CORDIS · 101111948 · HORIZON
14AMI 14 Angstroms Module Integration
Coordinator: ASML NETHERLANDS B.V. (NL)
The 14AMI project is about creating technological solutions for the 14 Angstrom CMOS technology node, including a fully integrated functional CFET (Complementary Field Effect Transistor) as new active CMOS device, and state-of-the-art holistic metrology techniques for both wafer and mask inspection and review. All is aimed to keep the pace in the industry to follow “Moore’s law”. The project addresses the following 3 main pillars that are relevant in enabling manufacture of 14A technology, 1) lithography, 2) metrology and 3) process module integration.In lithography the aim is to realize solu…
About Horizon Europe (2021–2027)
Horizon Europe is the EU's current research and innovation programme, covering 2021 to 2027 with a budget of roughly €95.5 billion. Its three pillars are Excellent Science (frontier research and mobility), Global Challenges and European Industrial Competitiveness (mission-driven collaborative projects in health, climate, digital, security and food) and Innovative Europe (the EIC and EIT). It also funds five EU Missions targeting cancer, climate adaptation, smart cities, oceans and soils.
EU contribution: €25.0M awarded to the consortium. The project runs over approximately 3 years from 2023-05-01 to 2026-04-30.
Full record on CORDIS — partners, deliverables, publications, news.
Open on cordis.europa.eu → Grant DOI ↗More from NL
see all →- UNITE4TB — ACADEMIA AND INDUSTRY UNITED INNOVATION AND TREATMENT FOR TUBERCULOSIS101007873 · H2020 · €92.5M
- GN5-2 — GN5-2101194278 · HORIZON · €80.0M
- GN4-3 — Horizon 2020: H2020-SGA-INFRA-GEANT-2018 (Topic [a] Research and Education Networking)856726 · H2020 · €77.5M
- GN4-2 — GN4-2 Research and Education Networking - GÉANT731122 · H2020 · €59.0M
- GN5-1 — GN5-1101100680 · HORIZON · €55.0M
- BIGPICTURE — Central Repository for Digital Pathology945358 · H2020 · €32.3M
Other HORIZON projects
see all →- EUROfusion — Implementation of activities described in the Roadmap to Fusion during Horizon Europe through a joint programme of the members of the EUROfusion consortium101052200 · DE · €549.4M
- EITUM-BP26-28 — EIT Urban Mobility Business Plan 2026-2028101269525 · ES · €206.9M
- PARC — Partnership for the Assessment of Risks from Chemicals101057014 · FR · €200.0M
- EIT RM BP23-25 — EIT RawMatrials Business Plan 2023-2025101113034 · DE · €155.5M
- SGA1-HE — COST: Europe's most empowering research programme Strengthening science and innovation through research networking101052416 · BE · €153.0M
- EIT HEI — EIT Higher Education Initiative - Scaling Europe’s Innovation Ecosystems101270329 · DE · €130.0M
Frequently asked questions
- Who funds this research project?
- This project is funded by the European Union through the Horizon Europe (2021–2027) programme, under the HORIZON-JU-IA funding scheme.
- What is the EU contribution?
- The European Commission contributes €25.0M.
- Which EU programme funds it?
- The project is funded under Horizon Europe (2021–2027), call HORIZON-KDT-JU-2022-1-IA.
- Who coordinates the project?
- The project is coordinated by ASML NETHERLANDS B.V. (NL).
- What is the project timeline?
- The project runs from 2023-05-01 to 2026-04-30 — approximately 3 years.
- Where can I find the full project record?
- The complete record — partners, deliverables, publications and news — is published on CORDIS under project ID 101111948.